以時間轉換數位為基礎之低成本溫度感測器設計

Abstract

本論文研製之溫度感測器是以CMOS為主，由時間轉數位,內建於晶片,且為低成本的設計。由於不依賴任何BJT電晶體或類比轉數位器，所需晶片面積相對很小且耗電量亦低。其精簡的結構致使容易嵌入任何CMOS IC晶片內。此溫度感測器所產生之數位碼與溫度成正比之關係，是以時間轉數位之方式達成。此數位碼再參照對應溫度表即可用以表示目前溫度狀態。測試晶片是以UMC CMOS 90nm 1P9M製程所製造，其核心面積極小為0.01004平方公釐。若無經校正，有效解析度約為±0.14℃；若加入校正電路，則正好為0.1℃，且線性度極佳。

The proposed design is a CMOS-based, time-to-digital, on-chip and lost-cost temperature sensor. Without relying on any bipolar transistor or analog-to-digital converter, the required chip area is relatively small and the power consumption is low. Its simple structure allows it to be freely embedded onto any CMOS IC chip. The sensor generates a digital code proportional to temperature by time-to-digital method. The code with a lookup table can be directly used to indicate current thermal status. The test chip fabricated in the UMC CMOS 90nm 1P9M process has a extremely small area of 0.01004mm2. The effective resolution is around ±0.14℃ without calibration and exactly 0.1℃ plus perfect linearity with calibration.