矽基片雙抗諧振反射光波導分光元件之設計、研製與特性量測

Abstract

本論文研究矽基片雙抗諧振反射光波導(dual ARROW)分光元件，包括其設計、製作與特性量測。由於抗諧振反射光波導可具有較厚的導光區與較低的折射率，因此可以有效地和單模光纖耦合；且雙抗諧振反射光波導之耦合效率可以利用調整結構對稱性來控制，因此可依不同需求，設計出符合所需的元件結構。在此研究中，首先利用轉移矩陣法(TMM)和等效折射係數法(EIM)來分析及設計抗諧振反射光波導之結構，接著應用波束傳輸法(BPM)來模擬雙抗諧振反射光波導分光元件傳輸特性。藉由上述之分析方法及模擬結果，我們設計波導間距為26微米的雙抗諧振反射光波導之分光元件，進而實作其元件並加以量測特性。量測結果如下 : 傳輸損耗分別為13.5、14.7、10.3、14.8 dB/cm。其分光波道間之不均勻度差及標準差平均值為1.59 dB及0.154 dB，最後，探討量測誤差及建議改善方法。由製作之雙抗諧振反射光波導分光元件特性顯示其可有效分光。

In this thesis, the Si-based dual ARROW power splitters is investigated, including device design, fabrication, and characterization. ARROW waveguides can guide waves in low-index cores with a large core size such that their core index and size can be compatible with single-mode fiber index and diameter, which provide efficient coupling with fibers. Furthermore, a dual ARROW waveguide can operate as a directional coupler or as two decoupled waveguides by controlling the structural symmetry. Dual ARROW power splitters were realized with ARROW structure in the vertical and horizontal directions. We began with analyzing and designing ARROW structure with the transfer matrix method (TMM) and the effective index method (EIM). Then, the beam propagation method (BPM) was utilized to simulate the propagation characteristics of the dual ARROW power splitter. With above analytical methods and simulation results, we designed the dual ARROW power splitter with separation width is 26 贡m. In addition, we fabricated these devices and measured the characteristics. The propagation losses are 13.5, 14.7, 10.3, 14.8 dB/cm. The average value of the imbalance and the standard deviation of the power splitter are 1.59 dB and 0.154 dB, respectively. Experimental results are discussed and some suggestions are given. Measured results show that our dual ARROW power splitters can be realized.