矽基片B型抗諧振反射光波導結構光子晶體波導之設計、研製與特性量測

Abstract

本論文主要是探討矽基片B 型抗諧振反射光波導(ARROW-B)結構 結合三角晶格光子晶體波導元件之設計、研製與特性量測。此波導元件結構在水平方向上，利用二維光子晶體能隙導波機制；而在垂直方向上，利用抗諧振條件形成反射光波導結構，可具有較厚的導光區，因此可以和單模光纖做有效率的耦合。在此研究中，首先利用轉移矩陣法(TMM)來分析及設計B 型抗諧振反射光波導之結構，接著以平面波展開法來計算二維三角光子晶體能帶，並且使用有限差分時域法(FDTD)來模擬ARROW-B 結構之光子晶體波導的傳輸行為，其計算出針對傳輸波長λ為1.55 μm 之ARROW-B 結構之光子晶體波導的傳輸損耗為11.8 dB/mm。我們利用國家奈米元件實驗室的製程機台製作出ARROW-B 結構之三角光子晶體波導元件，再以本實驗室架設的光學量測儀器量測ARROW-B 結構之光子晶體波導元件傳輸功率，並且計算傳輸損耗。最後，探討初步製作原件傳輸損耗比預期還高的原因和提出製程上改善方法。

In this research, the design, fabrication, and characterization of Si-based photonic crystal waveguides with ARROW-B structures are investigated. The structure confines light with the 2D triangular photonic crystal (PC) waveguide in the horizontal direction and the ARROW-B structure in the vertical direction because a thick guiding core layer provides efficient coupling with a single-mode fiber. We began with analyzing and designing the ARROW-B structure with the transfer matrix method (TMM). Then, we utilized the plane wave expansion method to simulate the band diagram of the 2D triangular PC waveguide and then used the finite difference time domain method (FDTD) to simulate the transmission behavior of the wave in the ARROW-B-based PC waveguide. The simulation propagation loss approximates 11.8 dB/mm at a wavelength of 1.55 μm. Next, we fabricated the ARROW-B-based PC waveguide with the equipments in the National Nano Device Laboratories. And, we measured the transmission power with the optical instruments in our laboratory and evaluated the propagation loss. Finally, we discussed that why the propagation losses of preliminary fabricated devices are higher than what we expected, and proposed some suggestions to improve the fabrication.