晶背瑕疵檢測系統之環境光源與取像之控制

Abstract

本文提出一晶背瑕疵檢測系統的取像模組硬體架構以及其對應的照明與光環境控制模組。晶背瑕疵檢測系統採高速線陣列取像模組，可在定速運送的過程中連續拍攝取得檢測用影像，進行快速檢測，可避免停頓式取像的諸多缺點，如取像控制難度提高、取像時間長、檢測效能不佳、運動組件易損壞等問題。配合光機模組提供足量且均勻的照明環境，並將照明模組直接附掛於取像區的機構上，降低佈置檢測光源及其驅動電路所需的體積，提高此系統與不同機台組合使用時空間運用的靈活性。

The paper presents a hardware architecture about high speed acquisition module of a chip-back defects inspection system and its illumination environment control solution. Using a high speed linear array CCD for chip-back image scanning, the acquisition module can continuously scan images for quickly defect detection when chips transport in a constant speed, so it can avoid many disadvantages from a stop-and-go style image acquisition , such as the difficulty of motion control, taking long time for acquisition, mechanical parts damaging easily, low reliability, etc.

Illumination environment control module provides adequate and uniform lighting environment, and it can be directly plugged on the machine body of the chip-back defect inspection system. The plug-on design saves lots of space of the light source and light drive circuit board, and it improves the flexibility to use this inspection system on different transportation machines.