标题: 使用单轴、双轴控制输入之振动式陀螺仪系统
MEMS gyroscope system using single-axis/dual-axis control input
作者: 李嘉纬
Lee, Chia-Wei
陈宗麟
Chen, Tsung-Lin
机械工程学系
关键字: 微机电陀螺仪;状态观察器;瑕疵补偿;角速度;Mems Gyroscope;State Observer;Imperfection Compensation;Angular Rate
公开日期: 2010
摘要: 本文中的机械结构瑕疵包含:因制造过程造成的机械结构尺寸的误差(不确定性)、因结构设计造成的陀螺仪动态的非理想性。本文中的感测介面与感测电路瑕疵包含:因光罩摆放所造成的误差、运算放大器的电压偏移量、因导线产生的寄生电容。本文的做法是将机械结构、感测介面的瑕疵与感测电路非理想效应所造成的影响整理成为未知的系统參數包括:系统质量、刚性系數、阻尼系數、讯号比例常
數(scale factor)、讯号偏压飘移量(signal drifts)。
本文主要分为兩部分,一是没有考虑感测电路的情况下,设计一狀态观察器,并于单轴(驱动轴)输入兩频率的讯号或是兩频率以上的讯号,以讯号处理的方式(软体)來估测出陀螺仪动态与系统未知參數及待量测的角速度。因此,不需要兩轴控制输入,不需要事先知道陀螺仪质量块的重量。预计可大幅降低微机电陀螺仪的制造成本与技术
门槛,进而使得微机电陀螺仪可广泛应用于各式电子产品。二是考虑感测电路且具有电路瑕疵的情况下,设计一狀态观察器,于兩轴给予控制输入,以讯号处理的方式來估测出陀螺仪动态与系统未知參數(包含讯号比例常數、讯号偏压飘移量)及待量测的角速度,并补偿其为理想陀螺仪动态系统,进而无须透过积分运算,直接估测待测物的角度。
The mechanical structure imperfections and circuit imperfections greatly affect the performance of a gyroscope system. Normally this problem is lessened by physically tooling the hardware structures, for example, expensive fabrication facilities, post-fabrication processes, and complicated circuit designs. The disadvantages of doing so are costly. Recently, more and more research proposed using control methods (software approaches) to compensate the effect resulting from those imperfections and obtain correct angular rates because they can be very cost effective. However, those approaches often require a gyroscope system equipped with dual-axis control inputs and
the mass of the proof mass must be known beforehand. The existing commercial gyroscopes only equips with single axis control input. Thus, those existing compensation methods can not apply.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT079714591
http://hdl.handle.net/11536/44748
显示于类别:Thesis


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