標題: | TEMPERATURE-DEPENDENCE OF HYDROGEN IMPLANT ON PASSIVATION OF ARGON IMPLANT DAMAGE IN SILICON |
作者: | CHIEN, HC ASHOK, S CHEN, MC 電控工程研究所 Institute of Electrical and Control Engineering |
公開日期: | 1-七月-1988 |
URI: | http://hdl.handle.net/11536/4506 |
ISSN: | |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS |
Volume: | 27 |
Issue: | 7 |
起始頁: | L1317 |
結束頁: | L1319 |
顯示於類別: | 期刊論文 |