Title: | A CONTROLLED RADIATION SOURCE AND ELECTRON X-RAY FLUX RATIOS IN AN ELECTRON-BEAM METAL EVAPORATOR |
Authors: | BHATTACHARYA, PK REISMAN, A CHEN, MC 交大名義發表 National Chiao Tung University |
Issue Date: | 1-Jul-1988 |
URI: | http://dx.doi.org/10.1007/BF02652106 http://hdl.handle.net/11536/4510 |
ISSN: | 0361-5235 |
DOI: | 10.1007/BF02652106 |
Journal: | JOURNAL OF ELECTRONIC MATERIALS |
Volume: | 17 |
Issue: | 4 |
Begin Page: | 273 |
End Page: | 283 |
Appears in Collections: | Articles |