标题: PDMS在微机电系统中的应用
Application of PDMS in MEMS
作者: 王嘉豪
Chiahao Wang
邱一
Yi Chiu
电控工程研究所
关键字: 矽胶;微机电;轴向静电致动;可移动距离增加;PDMS;MEMS;gap closing electrostatic actuator;extending of controllable distance
公开日期: 2004
摘要: 近年来,PDMS相关的研究越来越频繁了,不论是微流道网路,或者是薄膜、微阀门,PDMS都展现了制造的方便性以及优良的机械特性。本每研究中将会提出两个使用PDMS来制做的元件,首先是一个在上下电极板中包含有一个PDMS结构的轴向静电致动器。这种致动器使用PDMS的弹性,当一个PDMS的结构受到上下电极板的挤压,它会产生一个和压缩量成非线性的回复力。静电力的非线性特性会让一个轴向的静电力发生pull in的现像,而让可移动的距离只有原间隙的1/3。但是利用这一个非线性的回复力可以增加轴向致动器的可移动距离。本研究中致动器的可移动距离达到了原间隙的54%。
第二个元件是使用PDMS制做悬臂梁。和一般微机电常用的结构层材料polysilicon相比,PDMS的杨氏系数大约比的小了5个数量级,所以这种元件的驱动电压会很小。此外,适合PDMS的制程会能够经由在制做此元件的过程中发展出来。然而在本研究中并没有完成此一元件的制做,PDMS本身的杨氏系数小而让它不容易悬浮。但是在本研究中以经成功的蚀刻定义了一层旋涂的PDMS膜。
PDMS is a frequently used material in MEMS applications. Whether the systems such as microfluidic networks or the devices such as membranes and valves, PDMS is easy to fabricate and exhibit excellent mechanical properties. In this study, PDMS will be used to fabricate two devices. The first one is a gap-closing actuator with PDMS posts placed between the electrodes. Such a device employs the elasticity of PDMS. When a small PDMS post is compressed by two parallel plates, it undergoes a large deformation and therefore provides elastic restring force that is nonlinear with the compressive displacement. The nonlinear elastic restoring force of the PDMS post will be used to balance the nonlinear electrostatic force. Because the elastic restoring force is nonlinear, the gap-closing actuator can achieve a larger controllable displacement than the actuator with linear elastic structure. The measured data of this device reveal that the nonlinear elastic restoring of the PDMS posts can extend the controllable displacement of a gap-closing actuator. The controllable displacement achieves the 54% of the original gap.
The second device is PDMS cantilever beams. The Young’s modulus of PDMS is about 5 orders less than the polysilicon, which is a common by used structure material in MEMS. Therefore, to actuate such a device, the applied voltage will be much less. Besides, by fabricating such a device, the properties of PDMS can be obtained and the processes suitable for PDMS fabrication will be developed. But the results of the fabrication process reveal that the stiffness of PDMS is too small to suspend itself. However, processes to pattern a spun on PDMS layer was developed successfully.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT009112600
http://hdl.handle.net/11536/45557
显示于类别:Thesis


文件中的档案:

  1. 260001.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.