THE DIELECTRIC RELIABILITY OF INTRINSIC THIN SIO2-FILMS THERMALLY GROWN ON A HEAVILY DOPED SI SUBSTRATE - CHARACTERIZATION AND MODELING

Title:	THE DIELECTRIC RELIABILITY OF INTRINSIC THIN SIO2-FILMS THERMALLY GROWN ON A HEAVILY DOPED SI SUBSTRATE - CHARACTERIZATION AND MODELING
Authors:	CHEN, CF WU, CY LEE, MK CHEN, CN 工學院 College of Engineering
Issue Date:	1-Jul-1987
URI:	http://hdl.handle.net/11536/4627
ISSN:	0018-9383
Journal:	IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume:	34
Issue:	7
Begin Page:	1540
End Page:	1552
Appears in Collections:	Articles

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