TRANSPORT-PROPERTIES OF THERMAL OXIDE-FILMS GROWN ON POLYCRYSTALLINE SILICON - MODELING AND EXPERIMENTS

標題:	TRANSPORT-PROPERTIES OF THERMAL OXIDE-FILMS GROWN ON POLYCRYSTALLINE SILICON - MODELING AND EXPERIMENTS
作者:	WU, CY CHEN, CF 交大名義發表工學院 National Chiao Tung University College of Engineering
公開日期:	1-Jul-1987
URI:	http://hdl.handle.net/11536/4628
ISSN:	0018-9383
期刊:	IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume:	34
Issue:	7
起始頁:	1590
結束頁:	1602
Appears in Collections:	Articles

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