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學術出版;;Publications
期刊論文;;Articles
OXIDATION RESISTANCE CHARACTERISTICS OF SILICON THERMAL NITRIDE FILMS
OXIDATION RESISTANCE CHARACTERISTICS OF SILICON THERMAL NITRIDE FILMS
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A1983QB20100041.pdf
(504.8 KB)
Date
1983
Authors
WU, CY
KING, CW
LEE, MK
CHEN, CT
SHIH, CT
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https://ir.lib.nycu.edu.tw/handle/11536/4944
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