MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE

doi:10.1007/BF02653362

標題:	MICROSTRUCTURE AND PROPERTIES OF MULTILAYER-DERIVED TUNGSTEN SILICIDE
作者:	CHIOU, BS RAU, HL CHANG, PH DUH, JG 電控工程研究所 Institute of Electrical and Control Engineering
公開日期:	1-Jul-1987
URI:	http://dx.doi.org/10.1007/BF02653362 http://hdl.handle.net/11536/4634
ISSN:	0361-5235
DOI:	10.1007/BF02653362
期刊:	JOURNAL OF ELECTRONIC MATERIALS
Volume:	16
Issue:	4
起始頁:	251
結束頁:	255
Appears in Collections:	Articles