利用單步驟下壓法組裝之抬起式垂直梳狀靜電致動雙軸微掃描鏡之設計、製作及組裝

Abstract

半導體產業至今已發展得相當成熟，且微機電技術亦於近年來蓬勃發展。為了實現微型光學系統，可利用光機電技術(Micro-Opto-Electro- Mechanical System，MOEMS)，及利用三維抬起式微結構，建立一個擁有自由空間之微光學平台。 本論文研究之最終目標為設計一微光學資訊儲存平台，此微光學平台是以數個三維斜面微掃描鏡結構以及其他組裝於此平台上的光學元件所組成，並利用SOI (Silicon on Insulator)晶圓之兩層結構的特性製作抬起式微結構。 本實驗室之前已提出利用簡單下壓組裝法組裝45º抬升角度的單軸微掃描鏡，且成功將單軸微掃描鏡完成組裝抬升，並成功量測到組裝前靜態與動態掃描特性。本論文提出一個新的組裝抬升方法，利用基底層之側壁做為下壓板之固定卡榫，將原本的組裝步驟簡化為僅僅一個步驟，大幅縮短組裝微結構的時間，並將雙軸微掃描鏡製作於此可抬升之微結構上，以利未來應用於微光學讀取頭架構中，實現光學循軌伺服功能。 本論文已成功利用此單步驟下壓組裝法組裝30º、45º、60º等三種不同角度的雙軸微掃描鏡，並成功量測得到實際平均抬升角度分別為19.2º、31º、40º，並且對於抬升角度誤差問題加以探討。對於雙軸微掃描鏡之性能，也以成功量測到組裝前的動態掃描特性。單軸輸入驅動雙軸掃描之蛇狀扭轉彈簧設計的雙軸微掃描鏡於輸入純交流電壓±40Vac，輸入頻率400 Hz(換算掃描頻率800 Hz)，可得到全光學掃描角為15.11º。

The semiconductor industry has developed quite maturely, and MEMS technology is also booming in recent years. In order to achieve micro-optical systems, the use of Micro-Opto-Electro-Mechanical System (MOEMS) and three-dimensional (3-D) flip-up MEMS structures can establish a free-space micro optical bench. Because the SOI (Silicon on Insulator) wafer has two structure layers, it is suitable for flip-up micro structures. In our previous study, a 45º flip-up uniaxial micro scanning mirror assembled by the simple push method was proposed, and the assembly of uniaxial micro scanning mirror was successful. The static and dynamic scanning performance of the unassembled micro scanning mirror had been measured successfully. A new assembly method is proposed in this thesis. The assembly step is simplified as only one step, and the the assembly time of flip-up micro structure can be greatly shortened. A two-axis micro scanning mirror has been successfully fabricated on this flip-up micro structure to achieve the optical tracking servo function of the optical pickup head. The 30º, 45º, and 60º two-axis micro scanning mirror assembled by single-step push operation was designed and have been assembled successfully. The flip-up angles have been measured successfully; the average flip-up angles were 19.2º , 31º , and 40º , respectively. The dynamic scanning angle of the serpentine spring design of the two-axis micro scanning mirror were measured. When the iuput pure AC voltage was ±40Vac and the input frequency was 400 Hz (converted into scanning frequency of 800 Hz), the full optical scanning angle of the two-axis micro scanning mirror was 15.11º.