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DC FieldValueLanguage
dc.contributor.authorTSENG, HHen_US
dc.contributor.authorWU, CYen_US
dc.date.accessioned2014-12-08T15:06:08Z-
dc.date.available2014-12-08T15:06:08Z-
dc.date.issued1986-11-01en_US
dc.identifier.issn0741-3106en_US
dc.identifier.urihttp://hdl.handle.net/11536/4704-
dc.language.isoen_USen_US
dc.titleA NEW OXIDATION-RESISTANT SELF-ALIGNED TISI2 PROCESSen_US
dc.typeArticleen_US
dc.identifier.journalIEEE ELECTRON DEVICE LETTERSen_US
dc.citation.volume7en_US
dc.citation.issue11en_US
dc.citation.spage623en_US
dc.citation.epage624en_US
dc.contributor.department工學院zh_TW
dc.contributor.departmentCollege of Engineeringen_US
dc.identifier.wosnumberWOS:A1986E528000011-
dc.citation.woscount12-
Appears in Collections:Articles


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