以 TFT-LCD 廠粉末廢棄物資源化合成中孔洞材料及其二氧化碳氣體捕獲之研究

Abstract

中孔洞二氧化矽SBA-15 材料因其高孔徑大小、高壁厚，相較於 M41S 家族具有更好的熱穩定性。此類中孔洞材料由於合成時所使用 之三崁式界面活性劑P123 為中性，相對於合成M41S 所使用之陽離 子型界面活性劑(CTAB)不僅在價格上較便宜外，在環境汙染程度上 也相對較低。而光電廠之CVD 製程會產生大量含矽之廢棄粉末，因 此可進行資源再利用製程中孔洞材料。本研究的重心即為嘗試將此含 矽之光電廢棄粉末，以低溫萃取出之上澄液矽源，在常溫下合成類似 於SBA-15 結構之中孔洞氧化矽材，並於後續進行二氧化碳吸附測 試。結果發現以SiO2: 0.02 P123: 263 H2O: 16.2 NaOH: 2.22 H2SO4 可 合成得到較佳之中孔洞材料WP-Nano-0.02，其比表面積為661cm2/g、 孔洞大小為9.1 nm 及孔洞體積為1.5 cm3/g，而由氮氣吸脫附曲線及 TEM 之鑑定，更確認其為中孔洞吸附材；而於二氧化碳測試後，其 吸附量可達80 mg/g 之飽和吸附量，較以商用矽源製得之SBA-15 及 MCM-41 之吸附量還高。在價錢成本估算部分中，使用廢棄物粉末合 成WP-Nano-0.02 可相較於使用化學品合成SBA-15-0.02 節省約40 % 的價錢，更為使用化學品合成MCM-41 之四分之一的價錢。因此， 綜合成本考量和後端二氧化碳應用，使用此材料在未來二氧化碳捕獲 的應用上具有前瞻性。

The TFT-LCD photonic factory in Taiwan produces around 140,000 tones solid waste per year. It not only induces the treatment cost but also pollutes the environment. Therefore this study intends to recover the silica material from the TFT-LCD waste powder and use it for the manufacture of valuable nano-porous materials. The result show that by extraction with the NaOH solution, the TFT-LCD waste powder can be recovered and produces both silicate precursors for making nano-porous material and near purified NaF resource material. When using the waste powder derived silicate precursor solution and the non-ionic environment friendly surfactant of P123, the SBA-15 nano-porous material can be successfully made. It is demonstrated that the physical property of waste powder derived nano-porous material(WP-Nano) shows surface area of 500~700 cm2/g、pore size of a few nanometer and pore volume of around 1.0~1.5 cm3/g. The CO2 adsorption performance of WP-Nano is 80 mg/g which is better than SBA-15 using chemical silica as precursor. The cost analysis shows that the synthesized material of WP-Nano is about half the price of SBA-15 and quarter of the MCM-41 made from commercial silica precursors.