THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS

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DC Field	Value	Language
dc.contributor.author	LU, NCC	en_US
dc.contributor.author	LU, CY	en_US
dc.contributor.author	LEE, MK	en_US
dc.contributor.author	SHIH, CC	en_US
dc.contributor.author	WANG, CS	en_US
dc.contributor.author	REUTER, W	en_US
dc.contributor.author	SHENG, TT	en_US
dc.date.accessioned	2014-12-08T15:06:17Z	-
dc.date.available	2014-12-08T15:06:17Z	-
dc.date.issued	1984	en_US
dc.identifier.issn	0013-4651	en_US
dc.identifier.uri	http://hdl.handle.net/11536/4870	-
dc.language.iso	en_US	en_US
dc.title	THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS	en_US
dc.type	Article	en_US
dc.identifier.journal	JOURNAL OF THE ELECTROCHEMICAL SOCIETY	en_US
dc.citation.volume	131	en_US
dc.citation.issue	4	en_US
dc.citation.spage	897	en_US
dc.citation.epage	902	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:A1984SL25600042	-
dc.citation.woscount	28	-
Appears in Collections:	Articles

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