AQUEOUS PHOTOLITHOGRAPHIC ETCHING OF TGS

標題:	AQUEOUS PHOTOLITHOGRAPHIC ETCHING OF TGS
作者:	WANG, DC SHIE, JS CHEN, SH 交大名義發表光電工程學系 National Chiao Tung University Department of Photonics
公開日期:	1983
URI:	http://hdl.handle.net/11536/4895
ISSN:	0015-0193
期刊:	FERROELECTRICS
Volume:	49
Issue:	1-4
起始頁:	317
結束頁:	322
Appears in Collections:	Articles