標題: | POST-EPITAXIAL POLYSILICON AND SI3N4 GETTERING IN SILICON |
作者: | CHEN, MC SILVESTRI, VJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1982 |
URI: | http://hdl.handle.net/11536/4954 |
ISSN: | 0013-4651 |
期刊: | JOURNAL OF THE ELECTROCHEMICAL SOCIETY |
Volume: | 129 |
Issue: | 6 |
起始頁: | 1294 |
結束頁: | 1299 |
顯示於類別: | 期刊論文 |