標題: | SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING |
作者: | CHEN, MC SILVESTRI, VJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1981 |
URI: | http://hdl.handle.net/11536/5033 |
ISSN: | 0013-4651 |
期刊: | JOURNAL OF THE ELECTROCHEMICAL SOCIETY |
Volume: | 128 |
Issue: | 3 |
起始頁: | C107 |
結束頁: | C107 |
顯示於類別: | 期刊論文 |