SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING

Full metadata record

DC Field	Value	Language
dc.contributor.author	CHEN, MC	en_US
dc.contributor.author	SILVESTRI, VJ	en_US
dc.date.accessioned	2014-12-08T15:06:28Z	-
dc.date.available	2014-12-08T15:06:28Z	-
dc.date.issued	1981	en_US
dc.identifier.issn	0013-4651	en_US
dc.identifier.uri	http://hdl.handle.net/11536/5033	-
dc.language.iso	en_US	en_US
dc.title	SI EPITAXIAL QUALITY IMPROVEMENT BY POST-EPI POLY-SI GETTERING	en_US
dc.type	Meeting Abstract	en_US
dc.identifier.journal	JOURNAL OF THE ELECTROCHEMICAL SOCIETY	en_US
dc.citation.volume	128	en_US
dc.citation.issue	3	en_US
dc.citation.spage	C107	en_US
dc.citation.epage	C107	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:A1981LF08600368	-
dc.citation.woscount	0	-
Appears in Collections:	Articles