PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS

Full metadata record

DC Field	Value	Language
dc.contributor.author	CHEN, JH	en_US
dc.contributor.author	CHEN, MC	en_US
dc.date.accessioned	2014-12-08T15:06:32Z	-
dc.date.available	2014-12-08T15:06:32Z	-
dc.date.issued	1979	en_US
dc.identifier.issn	0020-7217	en_US
dc.identifier.uri	http://hdl.handle.net/11536/5098	-
dc.language.iso	en_US	en_US
dc.title	PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS	en_US
dc.type	Article	en_US
dc.identifier.journal	INTERNATIONAL JOURNAL OF ELECTRONICS	en_US
dc.citation.volume	47	en_US
dc.citation.issue	6	en_US
dc.citation.spage	555	en_US
dc.citation.epage	560	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:A1979JN25800004	-
dc.citation.woscount	1	-
Appears in Collections:	Articles