标题: PRE-OXIDATION GETTERING OF OXIDATION-INDUCED STACKING-FAULTS IN SILICON BY THE PHOSPHORUS DIFFUSION PROCESS
作者: CHEN, JH
CHEN, MC
电控工程研究所
Institute of Electrical and Control Engineering
公开日期: 1979
URI: http://hdl.handle.net/11536/5098
ISSN: 0020-7217
期刊: INTERNATIONAL JOURNAL OF ELECTRONICS
Volume: 47
Issue: 6
起始页: 555
结束页: 560
显示于类别:Articles