標題: | PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON |
作者: | CHEN, MC SILVESTRI, VJ 工學院 College of Engineering |
公開日期: | 1979 |
URI: | http://hdl.handle.net/11536/5106 |
ISSN: | 0013-4651 |
期刊: | JOURNAL OF THE ELECTROCHEMICAL SOCIETY |
Volume: | 126 |
Issue: | 8 |
起始頁: | C368 |
結束頁: | C368 |
顯示於類別: | 期刊論文 |