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dc.contributor.author張鴻儀en_US
dc.contributor.author孫喜眾en_US
dc.contributor.author張國明en_US
dc.date.accessioned2014-12-12T02:03:04Z-
dc.date.available2014-12-12T02:03:04Z-
dc.date.issued1984en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT732428006en_US
dc.identifier.urihttp://hdl.handle.net/11536/52025-
dc.language.isoen_USen_US
dc.title高/低摻雜濃度矽晶於N2O氣體的熱氧化及其元件應用zh_TW
dc.titleThermal oxidation of lightly and heavily doped silicon in N2O and it device applicationsen_US
dc.typeThesisen_US
dc.contributor.department電子研究所zh_TW
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