THERMAL-OXIDATION OF LIGHTLY-DOPED AND HEAVILY-DOPED SILICON IN PURE N2O

標題:	THERMAL-OXIDATION OF LIGHTLY-DOPED AND HEAVILY-DOPED SILICON IN PURE N2O
作者:	SUN, SC CHANG, HY 奈米中心 Nano Facility Center
公開日期:	1993
URI:	http://hdl.handle.net/11536/20220
ISBN:	2-86332-135-8
期刊:	ESSDERC '93 - PROCEEDINGS OF THE 23RD EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE
起始頁:	403
結束頁:	406
Appears in Collections:	Conferences Paper