標題: Design, fabrication and actuation of a MEMS-based image stabilizer for photographic cell phone applications
作者: Chiou, Jin-Chern
Hung, Chen-Chun
Lin, Chun-Ying
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1-七月-2010
摘要: This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two-axis decoupling XY stage 1.4 x 1.4 x 0.1 mm(3) in size, and adequately strong to suspend an image sensor for anti-shaking photographic function. This stabilizer is fabricated by complex fabrication processes, including inductively coupled plasma (ICP) processes and flip-chip bonding technique. Based on the special designs of a hollow handle layer and a corresponding wire-bonding assisted holder, electrical signals of the suspended image sensor can be successfully sent out with 32 signal springs without incurring damage during wire-bonding packaging. The longest calculated traveling distance of the stabilizer is 25 mu m which is sufficient to resolve the anti-shaking problem in a three-megapixel image sensor. Accordingly, the applied voltage for the 25 mu m moving distance is 38 V. Moreover, the resonant frequency of the actuating device with the image sensor is 1.123 kHz.
URI: http://dx.doi.org/10.1088/0960-1317/20/7/075025
http://hdl.handle.net/11536/5219
ISSN: 0960-1317
DOI: 10.1088/0960-1317/20/7/075025
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 20
Issue: 7
結束頁: 
顯示於類別:期刊論文


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