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dc.contributor.authorChiu, Yien_US
dc.contributor.authorChiou, Jin-Chernen_US
dc.contributor.authorFang, Weileunen_US
dc.contributor.authorLin, Yung-Jiunen_US
dc.contributor.authorWu, Mingchingen_US
dc.date.accessioned2014-12-08T15:06:45Z-
dc.date.available2014-12-08T15:06:45Z-
dc.date.issued2007-02-01en_US
dc.identifier.issn0018-9464en_US
dc.identifier.urihttp://dx.doi.org/10.1109/TMAG.2006.888402en_US
dc.identifier.urihttp://hdl.handle.net/11536/5301-
dc.description.abstractSmall-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectro-mechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.en_US
dc.language.isoen_USen_US
dc.subjectactuatoren_US
dc.subjectmicroelectromechanical systems (MEMS)en_US
dc.subjectoptical pickupen_US
dc.subjectsilicon on insulation (SOI)en_US
dc.subjectsmall form factoren_US
dc.titleDesign, fabrication, and control of components in MEMS-based optical pickupsen_US
dc.typeArticle; Proceedings Paperen_US
dc.identifier.doi10.1109/TMAG.2006.888402en_US
dc.identifier.journalIEEE TRANSACTIONS ON MAGNETICSen_US
dc.citation.volume43en_US
dc.citation.issue2en_US
dc.citation.spage780en_US
dc.citation.epage784en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000244011300035-
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