以模造玻璃技術製作高分子波導型可調式光衰減器之研究

Abstract

近年來高分子聚合物材料的發展，使其具有價格低、低光學傳播損耗(最低可達0.01dB/cm)、高T/O係數( )、高玻璃移轉溫度(Tg=250℃~400℃)及製作方便等優點，已被廣泛的應用在光被動與主動元件的製作上。在本論文中，我們提出了一個以模造玻璃（Molding Glass）技術來製作高分子熱光式光波導型可變光衰減器。元件的架構是以高分子材料為導光層及玻璃為基板（cladding）之S型嵌入式光波導。此元件在光通訊C-band區，能夠得到令人適當的衰減量。此光波導彎曲之設計非常適合使用來控制光能量的損耗。在元件製作完成後，其光學衰減量可達到30db（-1dB/℃）。此外元件製作設計非常適合與其他平面光波導光通訊元件整合成各式光通訊應用模組。

Polymer with low propagation loss, high glass transition temperature (Tg), and high thermo-optic coefficient ( ) have been used worldwide for photonic components. In this paper, a polymer waveguide type variable optical attenuator fabricated by molding glass technology is proposed. The S-shape buried waveguide structure with polymer core and silica cladding that attenuates light with satisfactory optical attenuation through the spectrum from 1.52□m to 1.57□m is presented. The waveguide bend design is fabricated by photolithography、electroforming and molding glass technologies and operates by controlling waveguide bend radiation loss. This device has 30db attenuation（-1dB/℃）after we carry out that device. In addition, this design is suitable to integrate with planar light-wave circuits（PLC）to fabricate the monolithic optical modules in application of optical communication