完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lin, Horng-Chih | en_US |
dc.contributor.author | Liu, Ta-Wei | en_US |
dc.contributor.author | Hsu, Hsing-Hui | en_US |
dc.contributor.author | Lin, Chuan-Ding | en_US |
dc.contributor.author | Huang, Tiao-Yuan | en_US |
dc.date.accessioned | 2014-12-08T15:07:01Z | - |
dc.date.available | 2014-12-08T15:07:01Z | - |
dc.date.issued | 2010-05-01 | en_US |
dc.identifier.issn | 1536-125X | en_US |
dc.identifier.uri | http://dx.doi.org/10.1109/TNANO.2009.2029573 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/5488 | - |
dc.description.abstract | A new method is proposed and demonstrated to fabricate planar thin-film transistors and trigated nanowire (NW) devices simultaneously on the same panel. By using an oxide-nitride oxide stack as the gate dielectric, the NW devices could also serve as nonvolatile Si-oxide-nitride-oxide-Si (SONOS) memory devices. Our results indicate that the combination of trigate and NW channels help to improve the device performance in terms of steppers subthreshold swing and reduced threshold voltage. Improvement in programming and erasing efficiency of the nonvolatile SONOS memory devices is also demonstrated with the trigated NW structure. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | Field-effect transistor | en_US |
dc.subject | multiple gate | en_US |
dc.subject | nanowire (NW) | en_US |
dc.subject | poly-Si | en_US |
dc.subject | Si-oxide-nitride-oxide-Si (SONOS) | en_US |
dc.title | Trigated Poly-Si Nanowire SONOS Devices for Flat-Panel Applications | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1109/TNANO.2009.2029573 | en_US |
dc.identifier.journal | IEEE TRANSACTIONS ON NANOTECHNOLOGY | en_US |
dc.citation.volume | 9 | en_US |
dc.citation.issue | 3 | en_US |
dc.citation.spage | 386 | en_US |
dc.citation.epage | 391 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:000277775700019 | - |
dc.citation.woscount | 5 | - |
顯示於類別: | 期刊論文 |