微影成像技術應用於硬碟表面成紋之磨潤學探討

Abstract

研究一新的可控制性成紋技術用以降低磁頭與硬碟之間的摩擦，以微影成 像及蝕刻技術在硬碟表上製造不同的圖案，應用 AlMg/NiP為基板，待光 罩上圖案轉移到基板後, 連續濺鍍薄膜完成硬碟製造。表面形貌以 NOP 及 OM 來觀察，磨潤特性用 CSS 及 Drag Testing來分析，研究其不同的 接觸點尺寸及距離對摩擦及磨耗的影響。我們發現摩擦係數與其接觸面積 沒有關係，但與硬碟表面接觸高度有關。 A new controllable texturing technique was employed to reduce the friction between magnetic head and disc. Discs with various patterns, delineated by microlithographic and etching techniques, were investigated. AlMg/NiP substrate has been used. After the mask patten had been transferred to substrate, various metal films and overcoating layer were continuously sputtered. Surface topography was investigated by NOP ( Noncontact Optical Profiler) and OM(Optical Microscopy). Tribological properties were analyzed by CSS(Contact Star/Stop) and drag testing techniques. Different contact point sizes and the corresponding spaces were used to study their effects on the properties of friction and wearing. The results indicate that friction coefficient is independent on the contactarea but the surface height.