單模光纖與矽晶片光波導之耦合

Abstract

由於電子元件的交換時間及晶片尺寸的快速進展光學連線被提出來解決積 體電路間的傳輸問題.我們製造不同寬度與厚度的光波導作為連線介質.利 用數值方法 MPFE(Mode Propagation by Fourier Expansion) 模擬光纖 與晶片上光波導之耦合損失.我們用Cutback方法來量測光波導與光纖的耦 合損失與光波導的行進損失.我們又用非破壞性的Scattering Detection 方法來量測光波導的行進損失.我們比較數值方法的準確性並尋找結構參 數的最佳值. Due to the great improvement of switching time on electric device and the increasing chip size, the transmission delaysradually becomes the dominate factor that influence the overall system. Because optics show its excellent characteristic for transmission, optical waveguides are proposed to solve the communication problems at high freqency. Optical fibers areapable of transmit signals through long distance without much distortion, which is a good media to replace wire. Si-basedptical waveguides are compatible with Si IC technology today. Optical signals are sent through fibers and on-chip waveguides to the designed position on chip. In the transmission path, the discontinuities between fibers and waveguides result in serious coupling loss. By means of numerical simulation methods,PFE(Mode Propagation by Fourier Expansion), we can establish the simulation system to analyze the transmission characteristicnd get the optimum structure for our waveguides. We fabricate waveguides by Si3N4 in NCTU Semiconductor Reaserch Center. We measure the loss of the waveguides and theoupling loss between single-mode fiber and waveguide by cutback method and scattering detection method. We compare the simulation results with experiment results to investigate the feasibility of the MPFE method and our optical interconnect structure.