标题: 單模光纖與矽晶片光波導之耦合
Coupling Bewtween Single-Mode Fibers and Si-Based Optical Waveguides
作者: 黃崇展
Tsung-Chan Huang
黃遠東
Yang-Tung Huang
電子研究所
关键字: 光纖;光波導;耦合損失;行進損失;;Fiber; Optical waveguide; Coupling loss; Propagation loss;
公开日期: 1992
摘要: 由於電子元件的交換時間及晶片尺寸的快速進展光學連線被提出來解決積
體電路間的傳輸問題.我們製造不同寬度與厚度的光波導作為連線介質.利
用數值方法 MPFE(Mode Propagation by Fourier Expansion) 模擬光纖
與晶片上光波導之耦合損失.我們用Cutback方法來量測光波導與光纖的耦
合損失與光波導的行進損失.我們又用非破壞性的Scattering Detection
方法來量測光波導的行進損失.我們比較數值方法的準確性並尋找結構參
數的最佳值.
Due to the great improvement of switching time on electric
device and the increasing chip size, the transmission
delaysradually becomes the dominate factor that influence the
overall system. Because optics show its excellent
characteristic for transmission, optical waveguides are
proposed to solve the communication problems at high freqency.
Optical fibers areapable of transmit signals through long
distance without much distortion, which is a good media to
replace wire. Si-basedptical waveguides are compatible with Si
IC technology today. Optical signals are sent through fibers
and on-chip waveguides to the designed position on chip. In the
transmission path, the discontinuities between fibers and
waveguides result in serious coupling loss. By means of
numerical simulation methods,PFE(Mode Propagation by Fourier
Expansion), we can establish the simulation system to analyze
the transmission characteristicnd get the optimum structure for
our waveguides. We fabricate waveguides by Si3N4 in NCTU
Semiconductor Reaserch Center. We measure the loss of the
waveguides and theoupling loss between single-mode fiber and
waveguide by cutback method and scattering detection method. We
compare the simulation results with experiment results to
investigate the feasibility of the MPFE method and our optical
interconnect structure.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT810430060
http://hdl.handle.net/11536/56922
显示于类别:Thesis