利用矽微加工之氣體感測元件之製作與量測

Abstract

本實驗以研究二氧化錫材料對氣體的偵測，使用電子束蒸鍍以及RGTO法製 作的材料對甲烷、一氧化碳及氫氣於爐管內作量測，同時利用CMOS相容製 程，並以矽之異方性蝕刻形成浮板結構，研製一低功率，低成本，可大量 生產的氣體感測元件，元件主要分為氣體偵測膜二氧化錫及兼具測溫功能 的白金加熱器，文中對元件結構設計、製作程序、量測設備建立、溫控電 路及輸出信號的電訊均做了探討，實驗結果證實此一浮板結構是可行且深 具潛力。最後結論為元件未來改進的地方。 We were using tin dioxide by the method of E-beam evaporation and RGTO for gas sensing of methane , carbon monooxide hydrogen and also using the standard CMOS process and silicon micromachining technique to fabricate a gas sensor of low power cosumption ,low cost and mass production. The structure of our sensor includes the gas sensing film of tin dioxide and the platium heater which can measrue the temperature . The investigation on the structure design ,process,the establishment of the measuring equipment , the circuit of constant temperature and electrical signal measuring were performed. The experimental result proves that the floating membrane is practical and potential . We also propose some improvements for the future fabrication of our sensor.