標題: | Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings |
作者: | Wu, WF Chiou, BS 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-五月-1997 |
摘要: | In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO1/ITO/substrate system are investigated. Coating of SiO2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO2. |
URI: | http://hdl.handle.net/11536/577 |
ISSN: | 0169-4332 |
期刊: | APPLIED SURFACE SCIENCE |
Volume: | 115 |
Issue: | 1 |
起始頁: | 96 |
結束頁: | 102 |
顯示於類別: | 期刊論文 |