硫化錳鎘薄膜的成長與光學性質之研究

Abstract

我們利用脈衝式雷射在矽晶片和玻璃上蒸鍍硫化錳鎘薄膜，並以不同錳含 量的硫化錳鎘靶材做為蒸鍍靶，研究在不同錳含量時硫化錳鎘薄膜的晶格 結構及光學性質。我們利用Ｘ光繞射儀(ＸＲＤ)、掃描式電子顯微鏡(Ｓ ＥＭ)和Ｘ光能量散射分析儀(ＥＤＡＸ)分析薄膜之結構及組成成份，利 用吸收光譜、光激冷光光譜及拉曼光譜量測其光學性質。從Ｘ光能量散射 分析的資料中，我們得知硫化錳鎘薄膜中錳含量從0.06變化到0.47。而從 掃描式電子顯微鏡的照片上亦可以看出硫化錳鎘結晶晶粒大小約在 400~600。另外在拉曼光譜分析中亦發現縱向及橫向光支模的譜峰有分裂 的現象，我們和別人曾在單晶上所得到的結果做一比較。 The Cd1-xMnxS thin films were grown on silicon and glass by pulse laser evaporation. The films were evaporated with different composition target of Mn to investigate the influnence of concentration on the optical properties and crystal structure of the films. We used x-ray diffraction (XRD), scanning electron microscope ( SEM ) and energy dispersive analysis of x-ray ( EDAX ) to determine the crystal structure and composition of the thin films. The optical properties of the films were investigated by the measurements of the absorption spectrum, photoluminescence spectrum and Raman spectrum. Our EDAX results showed that the concentration x of Mn in the fabricated films varied from 0.06 to o.47. The grains sizes were found to be 400~600 by SEM photographs. In the Raman spectrum, a LO-TO mode splitting was found. It is very similar to the results obtained by previous works.