釔鋇銅氧高溫超導薄膜製備及其紅外線偵測之研究

Abstract

以側軸濺鍍法成功地在藍寶石及氧化鎂單晶長出臨界溫度在85K以上的釔 鋇銅氧高溫超導薄膜，氧化鈰緩衝層被用來阻止鋁原子侵入超導層。這些 薄膜經光製版術及蝕刻等製程而成紅外線偵測器，其可偵測的波長範圍可 從紅光(0.63微米)到遠紅外光(10.6微米)。 YBa2Cu3O7-x superconducting thin films with Tc>85K were success- fully deposited on MgO(100) and R-plane(1102) sapphire by off- axis sputtering. CeO2 buffer layer was used to prevent from the interdiffusion of Al atom into superconducting layer. The infra- red detectors fabricated with YBCO thin films shows detectable wavelength ranged from red light(0.63.mu.m) to far- infrared(10.6 .mu.m)