Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 許順良 | en_US |
dc.contributor.author | Xu, Shun Liang | en_US |
dc.contributor.author | 張俊彥 | en_US |
dc.contributor.author | 林茂雄 | en_US |
dc.contributor.author | Zhang, Jun Yan | en_US |
dc.contributor.author | Lin, Mao Xiong | en_US |
dc.date.accessioned | 2014-12-12T02:12:48Z | - |
dc.date.available | 2014-12-12T02:12:48Z | - |
dc.date.issued | 1993 | en_US |
dc.identifier.uri | http://140.113.39.130/cdrfb3/record/nctu/#NT822430005 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/58517 | - |
dc.language.iso | en_US | en_US |
dc.title | 氟與雜質對矽化鎢製程的影響 | zh_TW |
dc.title | The roles of fluorine and dopants in W-polycide processes | en_US |
dc.type | Thesis | en_US |
dc.contributor.department | 電子研究所 | zh_TW |
Appears in Collections: | Thesis |