氟與雜質對矽化鎢製程的影響

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	許順良	en_US
dc.contributor.author	Xu, Shun Liang	en_US
dc.contributor.author	張俊彥	en_US
dc.contributor.author	林茂雄	en_US
dc.contributor.author	Zhang, Jun Yan	en_US
dc.contributor.author	Lin, Mao Xiong	en_US
dc.date.accessioned	2014-12-12T02:12:48Z	-
dc.date.available	2014-12-12T02:12:48Z	-
dc.date.issued	1993	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT822430005	en_US
dc.identifier.uri	http://hdl.handle.net/11536/58517	-
dc.language.iso	en_US	en_US
dc.title	氟與雜質對矽化鎢製程的影響	zh_TW
dc.title	The roles of fluorine and dopants in W-polycide processes	en_US
dc.type	Thesis	en_US
dc.contributor.department	電子研究所	zh_TW
顯示於類別：	畢業論文