完整後設資料紀錄
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dc.contributor.authorTsai, Meng-Yenen_US
dc.contributor.authorLiu, Tzong-Shien_US
dc.date.accessioned2014-12-08T15:07:33Z-
dc.date.available2014-12-08T15:07:33Z-
dc.date.issued2010-02-01en_US
dc.identifier.issn0257-9731en_US
dc.identifier.urihttp://hdl.handle.net/11536/5941-
dc.description.abstractTo develop nanotechnology, nanoparticle manipulation plays all Important role in the assembly of nanoelements This Study aims to Manipulate nanoparticles using an atomic force microscope and X-Y positioning stage Strain gauges serve as sensors to Measure the travel distance of piezo-drivers in an X-Y stage In all atomic force microscopy system Nanoparticles are pushed based oil sliding mode control whose robust properties can deal with model uncertainty and disturbance In addition, a fuzzy controller is responsible for compensating "up-particle contact loss". so its to establish all accurate and stable manipulation system Experimental results demonstrate pushing nanoparticles oil Inclined substrates, different limited scanning ranges with different slope angles, and removing and remaining nanoparticles oil inclined substrates.en_US
dc.language.isoen_USen_US
dc.subjectnanoparticleen_US
dc.subjectX-Y stageen_US
dc.subjectnanomanipulationen_US
dc.titleNanoparticle Manipulation Using Atomic Force Microscopyen_US
dc.typeArticleen_US
dc.identifier.journalJOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERSen_US
dc.citation.volume31en_US
dc.citation.issue1en_US
dc.citation.spage29en_US
dc.citation.epage37en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000275033900004-
dc.citation.woscount1-
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