統計製程管制在積體電路製造業之應用研究

Abstract

1924年美國貝爾實驗室的修華特博士 (Dr. W. A. Shew□t)提出統計管制 圖(Statistical Control Chart)後，經戴明博士(Dr. W.E. Deming)及裘 蘭( Dr. J. M. Juran)等多位品管大師大力推廣、發揚光大後，統計製程 管制(Statistical Process Control;簡稱SPC)縱橫產業界70餘年，一時 蔚為潮流；尤其，近十年來積體電路(Integrated Circuit; 簡稱IC)產業 蓬勃發疳，SPC在IC製造過程中扮演關鍵性的角色，其功厥偉； 此乃因IC 的產製需要經過高精密度、且環環相扣的物理與化學製造過程，其繁複性 與困難度，遠超過一般性的產業，所以必須應用一套嚴謹周延的SPC管理 體系，來維繫與改善製程品質。本研究著重深入探討SPC系統的理念精神 及在IC製造業的應用狀況；縱向從分析調查顧客需求、轉換成產品規格、 進而對應出製程參數以從事製程管制，到最後的產品品質保證，以達到全 面性客戶滿意。 橫向則探討各功能單位中SPC的規劃推動、管理聯繫及落 實運作等課題。 個案研究部分則是探索IC廠實際的運作體系，及針對特 製型IC製造少量多單的生產模式，引用新速SPC的手法，實例模擬演練， 並與傳統SPC作一比較，評估其可行性。近幾年來，IC產業持續快速發展 ，新竹科學園區八吋晶圓廠的設立，如雨後春筍，然而，經驗傳承須要時 間來累積；SPC系統的推展，可維持品質穩定與製程改善，正可幫助這些 新廠早日進到製造技術成熟的階段，以在高度競爭的產業環境中脫穎而出 。 In 1924, Dr. W. A. Shewart at Bell Lab. suggested a statistical control chart. Many professionals such as Dr. W. E. Deming and Dr. J. M. Juran were promoting and developing that for many years. Since then, statistical cont chart. Many professionals such as Dr. W. E. Deming and Dr. J. M. Juran were promoting and developing that for many years. Since then, statistical control charts have been used in the industry for more than seventy years and become routine. Specifically, in the last ten years, the IC industry has developed rapidly; statistical process control (SPC) now plays a critical role in the IC's manufacturing process. Because IC manufacturing is a tight integration of complex precision physical and chemical processes, its complexity and difficulty are much more than other industries. It is necessary to use a punctual and complete SPC system to maintain and improve process quality in IC industry now and in the future.This paper focuses on the study of the application of the SPC system in the IC manufacturing industry. It vertically analyzes the customer cares-about; converts this to product specification; develops it into process specifications; then implements process control and finally assures quality in order to reach total customer satisfaction. Horizontally, it investigates how to promote SPC management and responsibility among the functional units. A case study puts emphasis on IC production in various products in small orders. Using Short-run SPC in a simulated implementation, we can see that it is reliable and can resolve the bottleneck of traditional SPC.In recent years, the IC industry has continued to grow rapidly. There are many new eight inch IC manufacturing factories being set up in the Hsin Chu Science-based Industry Park. Experience accumulation is time consuming. By implementing SPC, its contribution on product quality stabilization and process improvement can help these new factories to reach maturity early and make them highly competitive in the industry.