濺鍍氧化銥的固態電色研究及固態電色二氧化碳感測元件

Abstract

當氧化銥薄膜外加一負陰極偏壓,使得H+離子注入氧化 銥薄膜界面時,可使氧化銥薄膜顏色由黑色變為透明無色,而隨著條件不 同,電色反應會隨著改變.當在以PVA/H3PO4 做固態電解質電色反應中,薄 膜厚度越厚,外加偏壓越大,濺鍍溫度越低,則氧化銥穿透率的改變越大.當 以PVA/KHCO3作固態電解質披覆在氧化銥薄膜上,外加一固定負偏壓,則當 CO2溶於PVA中殘餘水份時,會產生酸化作用,解離出氫離子而使得氧化銥薄 膜產生電色反應,可對CO2做感測;在穿透氏光學量測中,穿透率的改變量 達10%,外加偏壓的大小為1V;在反射式光學量測中,穿透率的改變量達8%, 外加負偏壓為1.3V. When cathodically biased,iridium oxide films can intercalateH+ at the surface and turn from an apparent black color to nearly transparent.This electrochromic behavior depends on several variables:the measured change in optical transmission for the iridium oxide thin films is greater when the film thickness is larger,the external bias is greater or the temperature during sputtering of the film is lower.When covered with the solid electrolyte PVA/KHCO3 and subjected to a fixed external bias, the iridium oxide can intercalate H+ that is released by the acidifying action from CO2 gas equilibration within the residual water of the electrolyte. This makes it possible for the construction of the current CO2 gas microsensor underinvestigation.For an optical transmission experiment,the CO2 gas caused a~10% change in the transmission of the device under an external bias of-1.0V.When configured to run in a reflective optical experiment, the CO2gas caused a ~8% change in transmission of the device under an externalbias of -1.3V