三氧化鎢/氧化銥二極體元件及其對二氧化碳之感測研究

Abstract

我們利用三氧化鎢/氧化銥製成二極體元件。因為聚乙烯醇可讓氫離子自 由通過,故我們利用其當作固態電解。當加偏壓時,三氧化鎢與氧銥產生互 補性氧化還原反應,因而使薄膜產生導電度的改變。我們亦利用與此種二 極體元件相同的結構,但使用含碳酸根的聚乙烯醇為電解質,製成可在室溫 下操作的固態二氧化碳感測元件。此種感測器可感測不同濃度的二氧化碳 。 A new diode has been made by the WO3and IrOx sputtered films .The PVA conductor is used as the solide-state electrolyte Because the H+ ions can pass through freely .when biased,the WO3-IrOx is subjected to a complementtary redoxreaction that changes the conductivity of the film.We also use the diode as a solid-state CO2 gas sensor working at room temperature.It can detect different CO2 concentration.