三氧化鎢/氧化銥固態電化學二極體元件及其對二氧化碳氣體感測之研究

Abstract

本論文的內容為以 RF 濺鍍方式,在白金電極上先後鍍上三氧化鎢薄 膜以及氧化銥薄膜,而且讓兩薄膜中間部份重疊,並在薄膜表面上覆蓋一層 固態電解質(2mM KHCO3/PVA),製成一種新的光/電開關二極體元件,以及研 究其在室溫下對二氧化碳氣體之感測能力.本實驗之工作原理是利用不同 濃度之二氧化碳氣體能和固態電解質(2mM KHCO3/PVA)反應,解離出不同濃 度的 H+ 離子,使得薄膜之氧化還原電位改變,在定偏壓的作用下,產生明 顯不同的電流變化量,這結果使得此光/電開關二極體具有感測二氧化碳氣 體的能力.經過實驗測試後,不但在室溫下對二氧化碳之感測有良好的可逆 性及重覆性,甚至對於濃度小於 10 %之二氧化碳氣體,元件也同樣具有很 好的感測能力. The WO3 and IrO2 sputtered thin films were grown on Pt electrodes,respectively,and the part of these thin films were overlapped.Then the films were coated with the solid-state electrolyte(2mM KHCO3/PVA) successively to fabricate the new optical/electric switching diode which was the CO2 sensor. The principle of this diode was the interactions between the various CO2 concentrations and the solid-state electrolyte(2 mM KHCO3/PVA) which the different H+ ion concentrations can be ionized.The redox potential will be varied by the ionizedH+. Under a forward-bias,the diode will be sensitive for CO2 by the obvious current variance.We have found that CO2 measurements of the diode were revealed well reproducible.Even the low CO2 concentrations(e.g. < 10%),the diode still exhibited good sensitiveness.