标题: | 微细圆锥形钻石场发射阵列的制作及特性研究 Fabrication and Characterization of the Sub-micron Cone-shaped Diamond Field Emitter arrays |
作者: | 王东荣 Wang, Dung-Rung 陈家富 Chia-Fu Chen 材料科学与工程学系 |
关键字: | 钻石;场发射阵列;掺磷;Diamond;FEA;P-doped |
公开日期: | 1996 |
摘要: | 近几年来真空微电子科技以吸引许多研究者的兴趣,特别是作为场效 平面显示器用的场发射阵列元件。场发射阵列是利用一有微小尖锥阵列来 增加发射场电流,而此发射材料的外型和功函数或影响功函数的真空环境 ,都会改变整个发射场的发射功率。一般认为解决这个问题的关键在于如 何将矽和III-V族半导体化合物制成固态电子发射元件;而钻石的(111)面 有负的电子亲合力或非常小的电子亲合力特性,使得钻石成为最有潜力的 固态电子发射器材料。 在本论文中,我们利用偏压辅助微波电浆化学 气相沉积法,成功的制造出无掺杂和掺磷的圆锥形钻石场发射阵列。将此 阵列放入10-5 Torr得高真空中,以ITO玻璃当阳极,矽晶片当阴极,两电 极间距离50 um,则可测得场发射电流。结果,显示在外加600 V下得 到0.3 mA的发射电流,由F-N函数图的线性关系显示这种钻石阵列具有很 好的电子发射场效。 据作者所知、本论文是第一篇报导以CVD法 制造出微细圆锥形钻石阵列的研究。 Field emitter devices fabricated by advanced microfabrication technologies are studied extensively as cathodes for vacuum microelectronic devices, such as filed emission displays(FED's). The development of field emitter array makes it possible for image display application. It integrates an array of microtips to increase the total emission current. Field emission is dependent upon the shape and work function of emitting material or vacuum environments which affects the work function. The key problem to be solved is the fabrication of the solid-state electron emission using both silicon and III-V compounds. Diamond was considered to be the most appropriate and probable candidate for the solid-state electron emitter, because diamond ( 111 ) has a negative or at least very small electron affinity. In this thesis, non-doped and phosphorus-doped diamond field emitter arrays have been successful fabricated using bias assisted microwave plasma chemical vapor deposition (BAMPCVD). The fabricated array was placed in a high vacuum pumping system with the pressure of ~ 10-5 Torr and the emission current as a function of the anode voltage was measured. The distance between the ITO glass anode and the device surface was held constant at 50 (m throughout the measurement. As a result, a current larger than 0.3 mA was obtained for an anode voltage of 600 V. A linear relationship in the Fowler-Nordheim plot indicated the existence of electron filed emission from the fabricated diamond field emitter array. This report is first to obtain a miniature-size cone-shaped diamond and conic diamond field emitter arrays by the fabrication technique of the bias assisted microwave plasma chemical vapor deposition. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT850159023 http://hdl.handle.net/11536/61599 |
显示于类别: | Thesis |