標題: | Development of FET-Type Reference Electrodes for pH-ISFET Applications |
作者: | Chang, Kow-Ming Chang, Chih-Tien Chao, Kuo-Yi Chen, Jin-Li 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | composite materials;electrochemical electrodes;ion exchange;ion sensitive field effect transistors;photoresists;polymer films |
公開日期: | 2010 |
摘要: | A reference field effect transistor (FET) fabrication method by using a perfluorosulfonated proton exchange membrane associated with ion-insensitive polymers is proposed. The single-layer film of the perfluorosulfonated polymer/photoresist composite among the eight films tested demonstrated the best performance of 5.8 mV/pH and 11.27 mV/pNa sensitivities. Meanwhile, the drift performances were 3.5 mV/h and less than 1 mV/h for the first and second 4 h tests. A high sensitivity of 52.1 mV/pH and a low interference of 4.61 mV/pNa were obtained in the range of pH 1-13 through the differential arrangement with ZrO(2) gate ion-sensitive field-effect transistors (ISFETs). Meanwhile, the transconductance match of the proposed reference FET/ISFET pair would simplify the differential readout circuits. |
URI: | http://hdl.handle.net/11536/6188 http://dx.doi.org/10.1149/1.3355904 |
ISSN: | 0013-4651 |
DOI: | 10.1149/1.3355904 |
期刊: | JOURNAL OF THE ELECTROCHEMICAL SOCIETY |
Volume: | 157 |
Issue: | 5 |
起始頁: | J143 |
結束頁: | J148 |
顯示於類別: | 期刊論文 |