膜尺寸變化對抗諧振反射光波導元件特性之影響

Abstract

本論文對於三種不同的抗諧振反射光波導結構，藉由電腦模擬評估其元件 上薄膜結構之尺寸變化對特性的影響。這三種結構分別是平板型單一光波 導、平板型雙波導耦合器、及立體條狀型雙波導耦合器。我們使用多層平 板理論 (Multilayer Slab Theory) 及固有值方法求得基模，再利用基模 來評估元件的傳導或耦合行為。我們並且用向量式光束傳播法 (Vector Beam Propagation Method) 來驗證對於原尺寸結構，其結果是吻合的。 我們發現膜尺寸改變對於第一種結構的導波特性影響很小，但是其造成的 結構不對稱性就對第二種結構的耦合行為影響甚鋸，第三種結構的耦合行 為對於膜尺寸變化的敏感度就比第二種小很多。模擬的結果對於將來抗諧 振反射光波導元件的設計及製造都是個很有用的參考。 The characteristic dependence on film dimension variation of three types of antiresonant reflecting optical waveguide (ARROW) structures are evaluated.In our simulations, we input TE and TM waves into single slab ARROWs, dualslab ARROW couplers, and dual channel ARROW couplers with different film dimension parameters. Multilayer slab theory is employed in the simulationsof the slab case and eigenvalue method are used in that of the channel case. Both methods are justified by the beam propagation method (BPM). We found that the performance of a single ARROW is inert to the film dimension variations but the coupling behavior of a slab dual ARROW coupleris highly sensitive to the film dimension symmetry of the two waveguides.The high sensitivity in a dual slab ARROW coupler is much relieved in a channelone. The result is a useful reference for the design and fabrication of ARROWdevices.