橫向刷式制動微小振盪器

Abstract

本篇論文是在探討橫向刷式微小振盪器,刷式振盪器的結構是由二微 米厚低壓化學汔相沈積成長的多晶矽所構成.為了要有好的特性,例如像讓 可移動結構有大位移,我們嘗試用活性離子蝕刻去求得較陡峭平滑的刷式 手指側壁.再者,對懸掛結構防止附著效應跟適當的應力控制的方法也被提 出,用來增加元件的良率.元件的機械振動,當加一驅動電壓去驅動元件時, 可以由元件感測端量出來的電流而偵測到他的振動. A laterally comb-drive vibrator with twenty fingers and comb gap, folded-beam length being 2um, 200um is studied in this thesis. Comb vibrator structureis fabricated from 2um-thick phosphorus-doped low-pressure chemical-vapor-deposited (LPCVD) polysilicon film. In order to have good characteristics suchas large displacement of movable fingers, the sharp and smooth sidewall of the comb fingers is tried by RIE etching. Moreover, the techniques for suspensionstructure to avoid sticking effect and suitable stress control are reportedto increase the yield of device. The mechanical vibration can be detected bymeasuring the current through the sensing pad of device with HP4145B while applying a driving voltage to drive the device.