完整後設資料紀錄
DC 欄位語言
dc.contributor.author江雲祺en_US
dc.contributor.authorJiang, Yun-Chien_US
dc.contributor.author曾俊元, 孫喜眾en_US
dc.contributor.authorTseung-Yuen Tseng, Shi-Chung Sunen_US
dc.date.accessioned2014-12-12T02:17:32Z-
dc.date.available2014-12-12T02:17:32Z-
dc.date.issued1996en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT850428100en_US
dc.identifier.urihttp://hdl.handle.net/11536/61973-
dc.description.abstract在本論文中,我們對五種旋覆式(spin-on)低介電質常數材料作了物性和
電性的分析。在物性方面主要是利用薄膜應力量測系統和FTIR來探討它的
吸水性和熱穩定性。我們發現含氟的聚合物在這兩方面的特性都要比只含
碳和氫的聚合物來得好,而只含氫的要比含碳氫的好些。在電性方面主要
是探討漏電流、崩潰電壓和介電質常數。在電性方面也是含氟的聚合物比
較好,但附著性較差。除此之外我們也做了低介電質常數材料在銅金屬化
上的研討,FOX-15 在沒有擴散障礙層時,只要對銅做350oC熱化處理,電
容的漏電即大幅增加!而PAE-2材料對銅的擴散抗力較佳。若加上擴散障
礙層的幫助,兩者均有不錯的電性。
In this thesis, we explore five different kinds of spin-on low
dielectric constant materials. We characterize their physical
and electrical properties. In physical properties, we focus on
film moisture absorbance and thermal stability. We use thin
film stress measurement system and FTIR to understand their
properties. We find that fluorinated polymers have better
characteristics.In electrical properties, we explore the leakage
current, breakdown field, and dielectric constant. Fluorinated
polymers have lower leakage current, higher breakdown, and lower
dielectric constant but the film adhesion on silicon or oxide is
poor. We also explore the effect of copper on low dielectric
film. Without barrier metal, FOX-15 is very leak after 350 oC
anneal. Without barrier metal, PAE-2 cured at 500 oC can
withstand Cu diffusion up to 400 oC anneal. With diffusion
barriers, the thermal stability can reach 500 oC.
zh_TW
dc.language.isozh_TWen_US
dc.subject低介電質常數zh_TW
dc.subject旋覆式zh_TW
dc.subjectLow Dielectric Constanten_US
dc.subjectSpin-Onen_US
dc.title用於極大型積體電路金屬導線間之旋覆式低介電質常數材料之物性和電性zh_TW
dc.titlePhysical and Electrical Properties of Spin-On Low Dielectric Constant Materials for ULSI Intermetal Dielectric Applicationsen_US
dc.typeThesisen_US
dc.contributor.department電子研究所zh_TW
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