離子化機之性能分析

Abstract

本文主要以實驗方法探討在模擬無塵室之空間內離子化機系統性 能在不同狀況下之性能分析，實驗內容包括：(1)在不同高度下，不 同位置靜電衰退時間之量測(2)在不同高度下，不同位置靜電平衡值 之量測與評量指數(3)在同高度下，不同位置、不同濕度靜電衰退時 間之量測(4)在同高度下，不同位置、不同濕度靜電平衡值之量測與 評量指數(5)結晶之記錄與離子化機系統性能衰退之分析。結果發現， 離子化機系統之性能必須針對不同之高度而校正其性能。此外，濕度 對於離子化機之性能影響並不顯著。其次，離子化機系統經使用後， 在放射器之針頭所產生之結晶，不但會影響離子化機之靜電中和效率， 更會造成正負離子濃度不均勻之現象。

An experimental study is conducted to investigate performance of an ionizer system udner different situations. These experiments include five parts. There are (1) the decay time at different heights and places, (2) The ion balance and evaluation index number at different heights and places, (3) the decay time at different heights and places under different relative humidity, (4) the ion balance and evaluation index number at different heights and places under different relative humidity. And the record of the agglomeration on the emitter and influence of performance of the ionizer system. The results indicate that the ionizer system must adjust its output due to different heights, and the influence of the variation of relative humidity on the performance of ionizer system is slight (35% RH to 45% RH). Besides, the agglomeration on the emitter not only affects the ability of ionizer system but also causes new contamination to occur.