| 標題: | 化學機械研磨在深次微米半導體元件製造之應用 = Application of chemical-mechanical polishing to the fabrication of deep submicron semiconductor devices |
| 作者: | 王英郎 馮明憲, 曾偉志 電子研究所 |
| 公開日期: | 1996 |
| URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT856430119 http://hdl.handle.net/11536/62554 |
| 顯示於類別： | 畢業論文 |
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